SCU-XL800 Control Unit

The fully-digital SCU-XL800 turbo pump control unit is compatible with STP turbo pumps ranging from 600 l/s to 1300 l/s.
 
The SCU-XL800 reduces the vibration levels of less than 300 Hz which are difficult to eliminate with mechanical vibration isolators.
 
It achieves sub-nanometer vibration levels across the frequency spectrum using advanced Digital Signal Processor (DSP) techniques. The controller is suitable for use with electron microscopy, metrology and lithography systems where low-vibration is critical to the application.

Features and Benefits

• Enhances Performance of the STP Pump Range

        New magnetic bearing system achieves vibration levels of sub-nanometer order across the frequency
        spectrum
        Reduces the amplitude of low frequency vibrations which are difficult to suppress with mechanical vibration
        isolators
        Automatic Balancing System (ABS)
        Auto Vibration Reduction (AVR)

• Compatible Models

        STP-603/1003, STP-A803/A1303C
        Automatic recognition of the applicable pumps

• Advanced Pre-maintenance Function

        Precise maintenance timing
        Two-stage warning messages
        Rotor imbalance monitoring
        Back-up bearing damage monitoring
        Self-diagnostic functions

• Certifications

        SEMI® compliant, CE marked, UL listed