STPH301C

Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Informacje

Features and Benefits
Advanced rotor technology 

  •  Higher gas throughput
  •  Maximized process flexibility
  •  Oil free
  •  Low vibration
  •  High reliability
  •  Maintenance free
  •  Harsh process compatible
  •  Increased life

Advanced controller design 

  •  Auto tuning
  •  Self diagnostic functions
  •  d.c. motor drive
  •  Battery-free operation

Compact design 

  •  Small footprint
  •  Half rack controller
  •  5 axis magnetic suspension system
  •  Zero contamination
  •  Low maintenance
  •  Any orientation operation


Applications

  •  Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  •  Electron cyclotron resonance (ECR) etch
  •  Film deposition CVD, PECVD, ECRCVD, MOCVD
  •  Sputtering
  •  Ion implantation source, beam line pumping end station
  •  MBE
  •  Diffusion
  •  Photo resist stripping
  •  Crystal/epitaxial growth
  •  Wafer inspection
  •  Load lock chambers
  •  Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  •  High energy physics: beam lines, accelerators
  •  Radioactive applications: fusion systems, cyclotrons

 

Dane techniczne
Inlet flange ISO100K
Outlet port KF40
Purge port KF10
Water cooling fitting PT1/4
Pumping Speed  
  N2 300 ls-1
  H2 200 ls-1
Compression ratio  
  N2 >108
  H2 103
Ultimate pressure with bake out heating 10-7 Pa
  (10-9 Torr)
Max continuous outlet pressure 660 Pa
  (5 Torr)
Max Nitrogen throughput 2500 sccm
Rated speed 48000 rpm
Starting time 4 min
Max inlet flange temperature 120 °C
Input voltage 100 to 120 (± 10) V a.c. or
  200 to 240 (± 10) V a.c.
Power consumption 0.6 kVA
Pump weight 15 kg
Controller weight 9 kg
Pliki do pobrania
Edwards Maglev Turbos and the Environment Brochure