STP-iX455

The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motor drive system, providing a 50% reduction in vibration compared to previous generation turbo pumps. An integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.
The pump features 450 ls-1 pumping speed for nitrogen. The STP-iX455 is an excellent fit for electron microscope, metrology, lithography and other vibration sensitive applications.

Features and Benefits

• Compact Design including a fully integrated controller
• Inovative, Self-Sensing magnetic bearing system
• Digital 5-axis control
• Vibration levels reduced by 50% compared to the existing turbo pumps
• Can be configured to run corrosive processes
• Automatic Balancing System (ABS) standard
• Automatic Vibration Reduction (AVR) standard
• UL Listed, CE marked and SEMI® S2 compliant

Applications

• Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
• Electron cyclotron resonance (ECR) etch
• Film deposition CVD, PECVD, ECRCVD, MOCVD
• Sputtering
• Ion implantation source, beam line pumping end station
• MBE
• Diffusion
• Photo resist stripping
• Crystal/epitaxial growth
• Wafer inspection
• Load lock chambers
• Scientific instruments: surface analysis, mass spectrometry, electron microscopy
• High energy physics: beam lines, accelerators
• Radioactive applications: fusion systems, cyclotrons