STP-iXA3306C
The STP-iXA3306 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STPiXA3305 series.
The height of the pump is equal to the STP-XA2703/XA3203 and is also equal to the height of the STP-iXA3305 series without its power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.
Informacje
Features and Benefits
- Compact design including a fully integrated controller
- Innovative, self-sensing magnetic bearing system
- Digital 5-axis control
- Vibration levels reduced by 50% compared to the existing turbo pumps
- Can be configured to run corrosive processes
Applications
- Plasma etch (chlorine, fluorine and bromine chemestries) for metal (aluminium), tungsten and dialectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping and station
Dane techniczne
| Inlet flange size | ISO250F / VG250 / ICF305 | ISO320F / VG300 / ICF356 |
| Backing port size | KF40 | K40 |
| Pumping speed N2 | 2650 ls-1 | 3200 ls-1 |
| Pumping speed Ar | 2300 ls-1 | 2800 ls-1 |
| Weight | 80 kg | 83 kg |
| Compression ratio N2/H2 | >108 / 2 x 103 |
| Ultimate pressure | 10-7 Pa (10-9 Torr) |
| Allowable backing pressure | 266 Pa (2 Torr) |
| Max gas flow N2 *(water cooled only) | 4000 sccm |
| (6.76 Pam3s-1) | |
| Max gas flow Ar * (water cooled only) | 2100 sccm |
| (3.55 Pam3s-1) | |
| Rated speed | 27700 rpm |
| Starting time | <10 minutes |
| Mounting position | Any orientation |
| Input voltage | 200-240 V |
| Max input power without TMS | 1500 VA |
| Max input power with TMS | 1800 VA |
Pliki do pobrania
Edwards Maglev Turbos and the Environment Brochure