STP-iXR1606
STP-iXR1606 seriesmagnetically levitated turbo-molecular pump provides industry-leading performance and incorporates latest technology small power supply into the onboard control which is the same concept with STP-iXA2206/iXA3306 series. The pumping performance is improved by the newest developed revolutionary rotor design. This fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.
Informacje
Features and Benefits
- Eliminates connection cable between pump and control unit.
- Eliminates installation space and cost required by conventional rack type control unit.
- Compact design results in easy installation and small foot print.
- Highest pumping speed in the 8” TMP class, along with the STP-A1603.
- 32% reduced power consumption in the high gas flow area.
- I/O Remote, RS232C, RS485, STP-Link are standard ports
- Profibus and DeviceNet can be selected as options
Applications
- Glass Coating
- Solar PVD
- Industrial Sputtering
Dane techniczne
| Intel Flange Size | VG150 | VG200/VG250 |
| ISO160F | ISO200F/ISO250F | |
| ICF203 | ICF253/ICF305 | |
| Backing port size | KF40 | KF40 |
| Pump Speed | ||
| N2 | 1000 ls-1 | 1600 ls-1 |
| H2 | 800 ls-1 | 1200 ls-1 |
| Compression ratio | |
| N2 | >108 |
| H2 | 1 x 103 |
| Ultimate pressure | 10-7 Pa (10-9 Torr) |
| Allowable backing pressure | 266 Pa (2 Torr) |
| Max Gas size N2 (water cooled only) | 4700 sccm |
| (7.94 Pam3s-1) | |
| Max Gas size Ar (water cooled only) | 1800 sccm |
| (3.04 Pam3s-1) | |
| Rated speed | 36,500 rpm |
| Starting time | 8 min |
| Mounting position | Any orientation |
| Input voltage | 200 to 240 (± 10) V a.c. |
| Maximum input power | 750 VA |
| Weight | 48 kg |
Pliki do pobrania
Edwards Maglev Turbos and the Environment Brochure