STP-XA4503C
The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.
This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.
It has been designed to handle light and harsh duty applications, such as etch, implant, lithography and FPD processes.
Features and Benefits
- Advanced Rotor Design
Increased Argon performance
Highest pumping speed in its class
Wide process window
Higher throughput at lower pressure
Maintenance free
Harsh process compatible
- 5-axis Magnetic Suspension System
Zero contamination
Low vibration
High reliability
- Optimized Temperature Distribution
Low deposition
Built-in cooling mechanism
Higher gas throughput
Increased operating life
- Certifications
Conforms to international safety standards
UL listed, CE marked and SEMI® S2 compliant
| Inlet flange size | VF300, ISO320F, VG350 |
| Backing port size | KF40 |
| Pumping speed | |
| N2 | 3800 to 4300 ls-1 |
| (dependant on model) | |
| H2 | 2500 ls-1 |
| Compression ratio | |
| N2 | >108 |
| H2 | 6 x 103 |
| Ultimate pressure | 10-7 Pa / 10-9 mbar |
| Max allowable backing pressure | 266 Pa / 2.66 mbar |
| Max allowable gas flow N2 (Water cooled only) |
2800 sccm |
| 4.73 Pam3s-1 | |
| Maximum allowable gas flow Ar (Water cooled only) |
2150 sccm |
| 3.63 Pam3s-1 | |
| Rated speed | 24000 rpm |
| Run up time to 90% rated speed | 12 minutes |
| Mounting position | Any orientation |
| Water cooling | |
| Flow | 3 lmin-1 |
| Temperature | 5 – 25 °C / 41 – 77 °F |
| Pressure | 0.3 MPa |
| Recommended purge gas flow N2 | 50 sccm / 8.4 x 10-2 Pam3s-1 |
| Input voltage | 200 – 240 ±10 % V a.c. |
| Maximum input power (without TMS) | 1.5 KVA |