Atlas TPU

The Atlas TPU is a world proven system and the semiconductor industry's standard abatement system for CVD. In one model, there is suitability for all CVD and Etch applications, enabling World Semiconductor Council PFC emission reduction targets to be met. Each inlet can be individually configured for the highest level of abatement of all PFC gases, Fluorine (F2) or Chlorine TriFluoride (ClF3).

Features and Benefits

• Low Cost of Ownership

        Water Recirculation Unit (WRU) ensures low water usage

• Unrivalled Abatement Performance

        Independently verified
        Provides high flow, high performance, CF4 abatement
        Capable of treating high flows of ClF3

• Robust Field Performance
• Certified to SEMI S2, CE Marked and ETL Listed

Applications
The TPU can manage the process exhausts from four CVD or etch chambers, and each inlet can be independently configured for optimum PFC destruction performance.