Water Cooled Trap (WCT)

LPCVD nitride processes using dichlorosilane (SiH2Cl2) and ammonia (NH3) generate ammonium chloride (NH4Cl). On cooling, at atmospheric pressure, NH4Cl rapidly condenses out as a solid in the exhaust lines causing blockages. The water cooled trap provides a cost-effective solution for controlled deposition of these solid by-products. Both the trap and the liner are water-cooled so NH4Cl is deposited on the liner. The liner has a large capacity and is quick and easy to change.

Features and Benefits

• Designed for LPCVD Nitride Processes

        Reduces downtime
        Minimizes exhaust blockages

• Controlled Collection of Condensing Solids

        Ammonia (NH3) and Dichlorosilane (SiH2Cl2) processes only

• Compatible with All Edwards Vacuum Pumps
• Quick and Easy Liner Replacement
• Very Low Cost of Ownership

        Process cooling water is the only facilities requirement

• Minimum Footprint