HOx - Hot Oxidation System

The Hot Oxidation System (HOx) offers a significant advance in the performance of non-fuel oxidation technology. Targeted at CVD applications, the system ensures safe removal of pyrophoric gases to below flammable limits and the effective treatment of acidic by-products to prevent exhaust duct corrosion.
 
The HOx combines an innovative electrical heated oxidation unit with the proven three-stage wet scrubber from the inward-fired combustor product range to deliver excellent powder handling capabilities.

Features and Benefits

• Low capital cost
• Low cost of ownership

        No fuel
        Low water use
        Low power
        Small footprint

• Enhanced security

        PLC controlled
        Full system monitoring
        Tool interface
        SEMI S2-93 compliant

• Superior design

        High performance

• Up to 4 independent self cleaning inlets
• Unique oxidation chamber design increases destruction efficiencies while minimizing particulate deposition
• Proven three stage wet scrubber (from the inward fired combustor range) provides blockage-free particulate entrapment and highly efficient acid gas removal
• Novel construction on sliding platform provides easy servicing, resulting in lower maintenance requirements compared to competing units
• Integral bypass valves available as optional extra feature
• Integral water recirculation unit available as optional extra feature, to minimize utility consumption and COO

Applications
Ideal for most CVD applications including:

• PECVD TEOS, BPSG, Oxide
• PECVD Nitride
• Tungsten CVD
• LPCVD